I never saw any conclusive historical proof or evidence that Rashi’s daughters wore tefillin.
The Gemara does say that Mihal bat Shaul haMelekh wore tefillin and that the hakhamim didn’t object (Eruvin 96a). Amazes me how so many people nowadays object to the Gemara’s psak, “Nashim somhot reshut,” that women can perform mitzvot from which they are patur).